CS200 Mass Flow Controller&Flow Meter-Fornitore globale

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No. 8 Wenchang Avenue, Beijing Economic and Technological Development Zone (Postal Code: 100176)

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CS200 Mass Flow Controller&Flow Meter

The CS200 gas mass flow controller adopts advanced sensors and temperature compensation technology, so the product accuracy can reach within 1% of the

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advantage

The principle of using a constant power sensor compensates for temperature changes, fundamentally suppressing the zero drift phenomenon of the flowmeter and ensuring the linearity of the sensor.

The CS200C product adopts specialized metal surface treatment technology, and all surface metal materials in contact with gas are made of 316LVV. The metal surface roughness of the CS200C product can reach below 10RA, and the metal surface roughness of the CS200D product can reach 25RA.

CS200 products are strictly manufactured according to SEMI standards, and their dimensions comply with internationally recognized SEMI standards.

The CS200 series products support dual power supplies ranging from ± 8V to ± 16V+ 14V~+28V single power supply; Digital, analog input/output.

•product supportRS485, DeviceNet communication method.

A free client software with multi gas and multi range functions, automatic zeroing function, alarm function, soft start function, delay function, and powerful features.

Technical Parameter

CS200
model	CS200-A		CS200-C		CS200-D
Valve type	Normally open (flow specification ≤ 30SLM) Or normally closed	not have	Normally Open or Normally Closed	not have	Normally Open or Normally Closed	not have
Flow specification (N2)	(0～5,10,20,30,50,100,200,300,500) SCCM (0～1,2,3,5,10,20,30,50) SLM		(0～2,3,5,10,20,30,50,100,200,300,500) SCCM (0～1,2,3,5,10,20,30) SLM
accuracy	±1.0% S.P. (≥35% F.S.) ±0.35% F.S.(＜35% F.S.)
linear	±0.5% F.S.
repeatability	±0.2% F.S.
response time	≤ 1sec		≤ 0.8sec
Range of working pressure difference	0.05-0.35MPa flow specification ≤ 10SLM 0.1-0.35MPa 10 ＜ Flow specification ≤ 30SLM 0.2~0.45MPa 30 ＜ Flow specification ≤ 50SLM	＜0.02 MPa	0.05～0.35MPa Flow specification ≤ 10SLM 0.1～0.35MPa Flow specification>10SLM	＜0.02 MPa	0.05～0.35MPa Flow specification ≤ 10SLM 0.1～0.35MPa Flow specification>10SLM	＜0.02 MPa
Maximum working pressure	0.45MPa
temperature coefficient	Zero point: ≤ ±0.05% F.S./℃； During adjustment: ≤ ± 0.1% F.S./℃ flow specification ≤ 30SLM During adjustment: ≤ ± 0.2% F.S./℃ flow rate specification>30SLM		Zero point: ≤ ±0.02% F.S./℃； During adjustment: ≤ ±0.05% F.S./℃
compressive strength	3MPa
Leakage rate	1×10^-10Pa·m³/ sec He		1×10^-11Pa·m³/ sec He
Sealing material	VITON		metal seal
Ambient Temperature	（5～45）℃		（0～50）℃
Input signal	Number: RS485 or DeviceNet or ProfiBus Simulation: (0-5) VDC or (4-20) mA or (0-20) mA	not have	Number: RS485 Or DeviceNet Or ProfiBus Simulation: (0～5)VDC Or (4-20) mA Or (0-20) mA	not have	Number: RS485 Or DeviceNet Or ProfiBus Simulation: (0～5)VDC Or (4-20) mA Or (0-20) mA	not have
output signal	Number: RS485 or DeviceNet or ProfiBus Simulation: (0-5) VDC or (4-20) mA or (0-20) mA
drift	＜ 0.6% F.S./year without zero point correction
power supply	± 8 to ± 16 VDC (bipolar) or+14 to+28 VDC (unipolar)
surface chemical composition	normal		Cr/Fe ratio ≥ 2.0, CrO thickness ≥ 20 (angstroms)		normal
Surface roughness	25 Ra		10 Ra		25 Ra
Standard joint form	Double card sleeve with a diameter of 6; Double card sleeve 1/4 ´ ´; Double card sleeve 3/8 ´; VCR1/4 ´ male connector; Double card sleeve with a diameter of 3; Double card sleeve 1/8 inch; VCO 1/4 "; φ 6 (inner) x1 hose connector; 5 (inner) x1.5 hose connector; 4 (inner) x1 hose connector; Double card sleeve with a diameter of 10mm; A-type sealed joint;		Double card sleeve with a diameter of 3; Double card sleeve with a diameter of 6; Double card sleeve 1/4; VCR1/4 male connector; 1.5 ´ C-type sealed joint; 1.5 ´ W type sealing joint
Form of power connector	D-type 9-pin male connector; D-type 15 pin male connector; DeviceNet connector; ProfiBus connector; Simulated connector
weight	1 Kg	0.8Kg	1.2Kg	1Kg	1.2Kg	1Kg

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